Thin film silicon-organic hybrid electro-optic modulator

In this paper, we report an silicon-organic hybrid (SOH) electro-optical (EO) Mach-Zehnder modulator based on 70 nm thick silicon nanomembrane. The frequency response extends beyond 33 GHz without degradation.

DOI: 10.1109/CLEO-PR60912.2024.10676567