1-to-32 H-tree Optical Distribution on Adhesively Bonded Silicon Nanomembrane

We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated with an excess loss of 2.2 dB and a uniformity of 0.72 dB.

• https://doi.org/10.1364/CLEO_SI.2014.SM3M.6