Silicon Nanomembrane Based Photonic Devices on Foreign Substrates

We demonstrate transferring 2cm x 2cm unpatterned nanomembrane onto glass substrates. A photonic crystal waveguide is patterned together with subwavelength grating couplers on the transferred nanomembrane. Group index up to 26.5 is experimentally demonstrated.

• https://doi.org/10.1364/CLEO_SI.2013.CTh1J.2