Inter-layer grating coupler on double-layer silicon nanomembranes

We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.

https://ieeexplore.ieee.org/document/6552911